Low polarization loss of long endurance on scavenged Ru-based electrode ferroelectric Hf0.5Zr0.5O2 by optimizing TiNx interfacial capping layer and its fatigue mechanism

  • Siddheswar Maikap
  • , Y.-P. Chen
  • , S.-Y. Huang
  • , J.-Y. Lee
  • , M.-H. Lee
  • , C. W. Liu
  • , Z.-F. Lou
  • , Senapati

Research output: Contribution to journalJournal Article peer-review

Original languageAmerican English
Pages (from-to)673 - 676
JournalIEEE Electron Device Letters
Volume45
Issue number4
StatePublished - 04 2024

Bibliographical note

公開公告號: IEEE Electron Device Letters
Announcement ID: IEEE Electron Device Letters

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