Low Resistivity and High Transparent Al-doped Zinc Oxide Films prepared by Reactive Radio-Frequency Magnetron

Shou-Yi Kuo, Wei-Ting Lin, Ming-Jer Jeng, Liann-Be Chang, Sung-Cheng Hu, Yung-Tien Lu, Ching-Wen Wu

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2009
Event	2009 International Electron Devices and Materials Symposia (IEDMS 2009) - Taoyuan, Taiwan Duration: 19 11 2009 → 20 11 2009

Conference	2009 International Electron Devices and Materials Symposia (IEDMS 2009)
Period	19/11/09 → 20/11/09

Cite this

@conference{ab479eed3a124f00b2cb39f498383602,

title = "Low Resistivity and High Transparent Al-doped Zinc Oxide Films prepared by Reactive Radio-Frequency Magnetron",

author = "Shou-Yi Kuo and Wei-Ting Lin and Ming-Jer Jeng and Liann-Be Chang and Sung-Cheng Hu and Yung-Tien Lu and Ching-Wen Wu",

year = "2009",

language = "American English",

note = "2009 International Electron Devices and Materials Symposia (IEDMS 2009) ; Conference date: 19-11-2009 Through 20-11-2009",

}

TY - CONF

T1 - Low Resistivity and High Transparent Al-doped Zinc Oxide Films prepared by Reactive Radio-Frequency Magnetron

AU - Kuo, Shou-Yi

AU - Lin, Wei-Ting

AU - Jeng, Ming-Jer

AU - Chang, Liann-Be

AU - Hu, Sung-Cheng

AU - Lu, Yung-Tien

AU - Wu, Ching-Wen

PY - 2009

Y1 - 2009

M3 - Proceeding

T2 - 2009 International Electron Devices and Materials Symposia (IEDMS 2009)

Y2 - 19 November 2009 through 20 November 2009

ER -