Low-temperature activation of ion-implanted dopants below the amorphization threshold

林瑞昌

Research output: Types of ThesisDoctoral thesis

Translated title of the contribution離子植入摻雜在低於非晶化閾值之低溫活化
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2023
Externally publishedYes

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