LPCVD反應爐晶圓二維溫度分佈之動態預測模式

Research output: Contribution to conference › Proceeding

Original language	Chinese (Traditional)
State	Published - 2010
Event	第八屆台塑關係企業應用技術研討會 - New Taipei City, Taiwan Duration: 18 06 2010 → 18 06 2010

Conference	第八屆台塑關係企業應用技術研討會
Period	18/06/10 → 18/06/10

Cite this

@conference{f17693da50b54fca9f94348422b400ed,

title = "LPCVD反應爐晶圓二維溫度分佈之動態預測模式",

author = "禎祥黃 and 詠淞莊 and Gow-Bin Wang and 俊瑜陳 and 子奇王",

year = "2010",

language = "繁體中文",

note = "第八屆台塑關係企業應用技術研討會 ; Conference date: 18-06-2010 Through 18-06-2010",

}