LPCVD爐管中晶圓溫度分佈之模式建立

黃 毓珊, Gow-Bin Wang, 陳 俊瑜, 王 子奇

Research output: Contribution to journalJournal Article peer-review

Original languageChinese (Traditional)
Pages (from-to)131-140
Journal華岡工程學報
Issue number26
StatePublished - 2010

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