LPCVD爐管中晶圓溫度分佈之模式建立

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@article{2129d933fbd54e56810e8243cd7746a4,

title = "LPCVD爐管中晶圓溫度分佈之模式建立",

keywords = "Configuration factor, LPCVD, Two-dimensional steady-state temperature prediction model, 二維穩態溫度預測模式, 低壓化學氣相沈積, 形狀因子",

author = "毓珊黃 and Gow-Bin Wang and 俊瑜陳 and 子奇王",

year = "2010",

language = "繁體中文",

pages = "131--140",

journal = "華岡工程學報",

issn = "2077-009X",

number = "26",

}

TY - JOUR

T1 - LPCVD爐管中晶圓溫度分佈之模式建立

AU - 黃, 毓珊

AU - Wang, Gow-Bin

AU - 陳, 俊瑜

AU - 王, 子奇

PY - 2010

Y1 - 2010

KW - Configuration factor

KW - LPCVD

KW - Two-dimensional steady-state temperature prediction model

KW - 二維穩態溫度預測模式

KW - 低壓化學氣相沈積

KW - 形狀因子

M3 - 文章

SN - 2077-009X

SP - 131

EP - 140

JO - 華岡工程學報

JF - 華岡工程學報

IS - 26

ER -