Mechanical properties of fluorinated DLC and Si interlayer on a Ti biomedical alloy

Chau Chang Chou; Yi Yang Wu; Jyh Wei Lee; Jen Ching Huang; Chi Hsiao Yeh

doi:10.1016/j.tsf.2012.06.089

Mechanical properties of fluorinated DLC and Si interlayer on a Ti biomedical alloy

Chau Chang Chou^*, Yi Yang Wu, Jyh Wei Lee, Jen Ching Huang, Chi Hsiao Yeh

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

24 Scopus citations

Abstract

Fluorinated amorphous diamond-like carbon (F-DLC) films were deposited on Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) technique using a mixture of methane (CH₄) and tetrafluoromethane (CF₄) gasses. A 100 nm Si interlayer was coated in advance by physical vapor deposition (PVD) process to improve the adhesion between F-DLC and Ti alloy. The structure and surface properties of F-DLC coatings, prepared by various fluorine flow ratios, were investigated by using X-ray diffraction spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. The mechanical properties were evaluated by nano-indentation, and the adhesion, by micro-scratch. The results showed that a moderate incorporation of the fluorine content in the DLC films can still maintain acceptable mechanical properties, which, on the other hand, obtains remarkable benefits of blood compatibility and anti-corrosion.

Original language	English
Pages (from-to)	136-142
Number of pages	7
Journal	Thin Solid Films
Volume	528
DOIs	https://doi.org/10.1016/j.tsf.2012.06.089
State	Published - 15 01 2013
Externally published	Yes

Keywords

Adhesion
Fluorinated diamond-like carbon
Mechanical property
PECVD
Titanium alloy

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10.1016/j.tsf.2012.06.089

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title = "Mechanical properties of fluorinated DLC and Si interlayer on a Ti biomedical alloy",

abstract = "Fluorinated amorphous diamond-like carbon (F-DLC) films were deposited on Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) technique using a mixture of methane (CH4) and tetrafluoromethane (CF4) gasses. A 100 nm Si interlayer was coated in advance by physical vapor deposition (PVD) process to improve the adhesion between F-DLC and Ti alloy. The structure and surface properties of F-DLC coatings, prepared by various fluorine flow ratios, were investigated by using X-ray diffraction spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. The mechanical properties were evaluated by nano-indentation, and the adhesion, by micro-scratch. The results showed that a moderate incorporation of the fluorine content in the DLC films can still maintain acceptable mechanical properties, which, on the other hand, obtains remarkable benefits of blood compatibility and anti-corrosion.",

keywords = "Adhesion, Fluorinated diamond-like carbon, Mechanical property, PECVD, Titanium alloy",

author = "Chou, {Chau Chang} and Wu, {Yi Yang} and Lee, {Jyh Wei} and Huang, {Jen Ching} and Yeh, {Chi Hsiao}",

year = "2013",

month = jan,

day = "15",

doi = "10.1016/j.tsf.2012.06.089",

language = "英语",

volume = "528",

pages = "136--142",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Mechanical properties of fluorinated DLC and Si interlayer on a Ti biomedical alloy

AU - Chou, Chau Chang

AU - Wu, Yi Yang

AU - Lee, Jyh Wei

AU - Huang, Jen Ching

AU - Yeh, Chi Hsiao

PY - 2013/1/15

Y1 - 2013/1/15

N2 - Fluorinated amorphous diamond-like carbon (F-DLC) films were deposited on Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) technique using a mixture of methane (CH4) and tetrafluoromethane (CF4) gasses. A 100 nm Si interlayer was coated in advance by physical vapor deposition (PVD) process to improve the adhesion between F-DLC and Ti alloy. The structure and surface properties of F-DLC coatings, prepared by various fluorine flow ratios, were investigated by using X-ray diffraction spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. The mechanical properties were evaluated by nano-indentation, and the adhesion, by micro-scratch. The results showed that a moderate incorporation of the fluorine content in the DLC films can still maintain acceptable mechanical properties, which, on the other hand, obtains remarkable benefits of blood compatibility and anti-corrosion.

AB - Fluorinated amorphous diamond-like carbon (F-DLC) films were deposited on Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) technique using a mixture of methane (CH4) and tetrafluoromethane (CF4) gasses. A 100 nm Si interlayer was coated in advance by physical vapor deposition (PVD) process to improve the adhesion between F-DLC and Ti alloy. The structure and surface properties of F-DLC coatings, prepared by various fluorine flow ratios, were investigated by using X-ray diffraction spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. The mechanical properties were evaluated by nano-indentation, and the adhesion, by micro-scratch. The results showed that a moderate incorporation of the fluorine content in the DLC films can still maintain acceptable mechanical properties, which, on the other hand, obtains remarkable benefits of blood compatibility and anti-corrosion.

KW - Adhesion

KW - Fluorinated diamond-like carbon

KW - Mechanical property

KW - PECVD

KW - Titanium alloy

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U2 - 10.1016/j.tsf.2012.06.089

DO - 10.1016/j.tsf.2012.06.089

M3 - 文章

AN - SCOPUS:84872936350

SN - 0040-6090

VL - 528

SP - 136

EP - 142

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Mechanical properties of fluorinated DLC and Si interlayer on a Ti biomedical alloy

Abstract

Keywords

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