Metal/SiO2/Y2O3/SiO2/Si TFTs Memory Device Using High-k Y2O3 Charge Trapping Layer deposited by E-gun

羅介廷

Research output: Types of ThesisMaster's thesis

Translated title of the contribution利用電子束蒸鍍機製作高介電常數材料氧化釔作為電子捕捉層的薄膜電晶體記憶體
Original languageAmerican English
Supervisors/Advisors
  • Pan, Tung-Ming, Supervisor
StatePublished - 2011
Externally publishedYes

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