MgF2, SiO2 and TiO2 thin films prepared by ion-assisted electron beam evaporation

MgF₂, SiO₂ and TiO₂ thin films prepared by ion-assisted electron beam evaporation

Rung Ywan Tsai, Mu Yi Hua, Fang Chuan Ho

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

1 Scopus citations

Original language	English
Title of host publication	Handbook of Thin Film Process Technology
Subtitle of host publication	98/2 Recipes for Optical Materials
Publisher	CRC Press
Pages	4-6
Number of pages	3
ISBN (Electronic)	9781351081245
ISBN (Print)	9781315893693
DOIs	https://doi.org/10.1201/9781351072793
State	Published - 01 01 2018
Externally published	Yes

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