MgF2, SiO2 and TiO2 thin films prepared by ion-assisted electron beam evaporation

MgF₂, SiO₂ and TiO₂ thin films prepared by ion-assisted electron beam evaporation

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

1 Scopus citations

Original language	English
Title of host publication	Handbook of Thin Film Process Technology
Subtitle of host publication	98/2 Recipes for Optical Materials
Publisher	CRC Press
Pages	4-6
Number of pages	3
ISBN (Electronic)	9781351081245
ISBN (Print)	9781315893693
DOIs	https://doi.org/10.1201/9781351072793
State	Published - 01 01 2018
Externally published	Yes

@inbook{9dec288b05984276a7200c8875a44704,

title = "MgF2, SiO2 and TiO2 thin films prepared by ion-assisted electron beam evaporation",

author = "Tsai, \{Rung Ywan\} and Hua, \{Mu Yi\} and Ho, \{Fang Chuan\}",

year = "2018",

month = jan,

day = "1",

doi = "10.1201/9781351072793",

language = "英语",

isbn = "9781315893693",

pages = "4--6",

booktitle = "Handbook of Thin Film Process Technology",

publisher = "CRC Press",

}

TY - CHAP

T1 - MgF2, SiO2 and TiO2 thin films prepared by ion-assisted electron beam evaporation

AU - Tsai, Rung Ywan

AU - Hua, Mu Yi

AU - Ho, Fang Chuan

PY - 2018/1/1

Y1 - 2018/1/1

UR - https://www.scopus.com/pages/publications/85053172563

U2 - 10.1201/9781351072793

DO - 10.1201/9781351072793

M3 - 章节

AN - SCOPUS:85053172563

SN - 9781315893693

SP - 4

EP - 6

BT - Handbook of Thin Film Process Technology

PB - CRC Press

ER -