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Modeling and Analysis of Dopant Segregation at the Silicon/Oxide interface

  • 林書賢

Research output: Types of ThesisMaster's thesis

Translated title of the contribution摻雜於矽與氧化層界面偏析之模式分析
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2001
Externally publishedYes

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