Multianalyte biosensor based on pH-sensitive ZnO electrolyte-insulator- semiconductor structures

Chyuan Haur Kao, Hsiang Chen, Ming Ling Lee, Che Chun Liu, Herng Yih Ueng, Yu Cheng Chu, Yu Jie Chen, Kow Ming Chang

Research output: Contribution to journalJournal Article peer-review

23 Scopus citations


Multianalyte electrolyte-insulator-semiconductor (EIS) sensors with a ZnO sensing membrane annealed on silicon substrate for use in pH sensing were fabricated. Material analyses were conducted using X-ray diffraction and atomic force microscopy to identify optimal treatment conditions. Sensing performance for various ions of Na+, K+, urea, and glucose was also tested. Results indicate that an EIS sensor with a ZnO membrane annealed at 600°C exhibited good performance with high sensitivity and a low drift rate compared with all other reported ZnO-based pH sensors. Furthermore, based on well-established pH sensing properties, pH-ion-sensitive field-effect transistor sensors have also been developed for use in detecting urea and glucose ions. ZnO-based EIS sensors show promise for future industrial biosensing applications.

Original languageEnglish
Article number184701
JournalJournal of Applied Physics
Issue number18
StatePublished - 14 05 2014


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