| Translated title of the contribution | NH3電漿氮化多重厚度閘極氧化層製程開發 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2002 |
| Externally published | Yes |
Multiple-gate-oxide-thickness Process Development by NH3 Plasma Nitridation
范恭鳴
Research output: Types of Thesis › Master's thesis