Nanopatterned optical and magnetic La0.7Sr0.3MnO 3 arrays: Synthesis, fabrication, and properties

Ming Chung Wu*, Chih Min Chuang, Yu Ching Huang, Yi Jen Wu, Kuo Chung Cheng, Ching Fuh Lin, Yang Fang Chen, Wei Fang Su

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

In the past few years, we have fabricated nanoscale La0.7Sr 0.3MnO3 periodic arrays with unique optical and magnetic properties successfully. These periodic patterns were made by La 0.7Sr0.3MnO3 resist that can be developed under a nontoxic and environmental friendly manner using pure water. The resist is also capable to exhibit both positive and negative resist behaviors depending on the electron beam dosage. Thus, these special characteristics are used to fabricate and tune periodic structure thin film having controlled optical reflectance properties in the wavelength of 300 nm to 800 nm with one fixed design electron beam pattern by simply changing the electron beam dosage only. Additionally, the magnetization of La0.7Sr0.3MnO 3 patterns can be enhanced by post sintering the sample at 900°C after electron beam irradiation. Therefore, our study provides a one-step, simple, and convenient alternative technique for the fabrication of tunable optical structure and nanoscale magnetic patterns, which form the building blocks for the study of optoelectronic and magnetic devices in nanoscale periodic arrays.

Original languageEnglish
Title of host publicationOxide-based Materials and Devices
DOIs
StatePublished - 2010
Externally publishedYes
EventOxide-based Materials and Devices - San Francisco, CA, United States
Duration: 24 01 201027 01 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7603
ISSN (Print)0277-786X

Conference

ConferenceOxide-based Materials and Devices
Country/TerritoryUnited States
CitySan Francisco, CA
Period24/01/1027/01/10

Keywords

  • Electron beam lithography
  • LaSrMnO
  • Magnetic property
  • Nanoscale
  • Optical property
  • Periodic array

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