Nanoscale (EOT= 5.6 nm) nonvolatile memory capacitors using atomic layer deposited high-k HfAlO nanocrystals

Research output: Contribution to conferenceProceeding

Original languageAmerican English
StatePublished - 2008
EventInternational Conference on Solid State Devices and Materials (SSDM) - Tsukuba, Japan
Duration: 24 09 200826 09 2008

Conference

ConferenceInternational Conference on Solid State Devices and Materials (SSDM)
Period24/09/0826/09/08

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