Nanoscale investigations of soft breakdown events in few layered fluorinated graphene

A. Ranjan, N. Raghavan, B. Liu, S. J. O'Shea, K. Shubhakar, C. S. Lai, K. L. Pey

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

In this study, we perform scanning tunneling spectroscopy (STS) on bi/tri-layered fluorinated graphene (FG) dielectrics, enabling investigation of the degradation and the breakdown phenomenon at the sub-nanometer scale. Our characterization results show that the energy gap can be tailored by surface functionalization of graphene with fluorine ions. Experimental evidence of electrical stress induced degradation and breakdown trends at localized spots across bi/tri-layered FG films is presented. Statistical analysis on bi-layered FG film breakdown voltage data reveals a tri-modal Weibull distribution trend possibly due to variations in the effective FG thickness due to imperfect fluorine incorporation at all C-sites during the fluorine diffusion process. Although preliminary, the results presented provide insight into the kinetics of degradation in graphene based 2-D dielectric materials.

Original languageEnglish
Title of host publication2017 International Reliability Physics Symposium, IRPS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages3C5.1-3C5.6
ISBN (Electronic)9781509066407
DOIs
StatePublished - 30 05 2017
Externally publishedYes
Event2017 International Reliability Physics Symposium, IRPS 2017 - Monterey, United States
Duration: 02 04 201706 04 2017

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Conference

Conference2017 International Reliability Physics Symposium, IRPS 2017
Country/TerritoryUnited States
CityMonterey
Period02/04/1706/04/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Keywords

  • Bandgap
  • Fluorinated graphene
  • Scanning tunneling spectroscopy
  • Soft breakdown

Fingerprint

Dive into the research topics of 'Nanoscale investigations of soft breakdown events in few layered fluorinated graphene'. Together they form a unique fingerprint.

Cite this