Normally-off matrix layout p-GaN gate AlGaN/GaN power HEMT with a through-substrate via process

Hsien Chin Chiu, Li Yi Peng, Chih Wei Yang, Hsiang Chun Wang, Kai Di Mai, Hsuan Ling Kao, Chien Kai Tung, Tsung Cheng Chang, Schang Jing Hon, Jia Ching Lin, Kuo Jen Chang, Yi Cheng Cheng

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