Novel rapid nondestructive technique for locating tiny voids in metallization line

Zheng Hao Gan*, Cher Ming Tan

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

Original languageEnglish
Pages (from-to)788-789
Number of pages2
JournalMicroscopy and Microanalysis
Volume8
Issue numberSUPPL. 2
DOIs
StatePublished - 2002
Externally publishedYes

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