Abstract
A novel cell operation scheme featuring low voltage, high speed, and excellent data retention has been proposed for SONOS flash memory. First, in 1bit/cell operation, program is achieved by a back-bias assisted hot hole injection, while erase is achieved by forward-bias assisted electron injection. For a thick tunnel oxide (50A°), the ultra-low voltage (∼5V) and ultra-fast speed (<1μsec) operation has been the record reported to date. On the other hand, a 2 bit/cell operation is also demonstrated, in which very good retention can be achieved in comparison to conventional operation schemes, e.g., CUE (channel hot electron) or BTB(Band-to-band) tunneling etc.
| Original language | English |
|---|---|
| Article number | 4418972 |
| Pages (from-to) | 457-460 |
| Number of pages | 4 |
| Journal | Technical Digest - International Electron Devices Meeting, IEDM |
| DOIs | |
| State | Published - 2007 |
| Event | 2007 IEEE International Electron Devices Meeting, IEDM - Washington, DC, United States Duration: 10 12 2007 → 12 12 2007 |
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