Novel ultra-low voltage and high-speed programming/erasing schemes for SONOS flash memory with excellent data retention

  • Steve S. Chung
  • , Y. H. Tseng
  • , C. S. Lai
  • , Y. Hsu
  • , Eric Ho
  • , Terry Chen
  • , L. C. Peng
  • , C. H. Chu

Research output: Contribution to journalConference articlepeer-review

18 Scopus citations

Abstract

A novel cell operation scheme featuring low voltage, high speed, and excellent data retention has been proposed for SONOS flash memory. First, in 1bit/cell operation, program is achieved by a back-bias assisted hot hole injection, while erase is achieved by forward-bias assisted electron injection. For a thick tunnel oxide (50A°), the ultra-low voltage (∼5V) and ultra-fast speed (<1μsec) operation has been the record reported to date. On the other hand, a 2 bit/cell operation is also demonstrated, in which very good retention can be achieved in comparison to conventional operation schemes, e.g., CUE (channel hot electron) or BTB(Band-to-band) tunneling etc.

Original languageEnglish
Article number4418972
Pages (from-to)457-460
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting, IEDM
DOIs
StatePublished - 2007
Event2007 IEEE International Electron Devices Meeting, IEDM - Washington, DC, United States
Duration: 10 12 200712 12 2007

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