Optical inspection of ITO conducting glass with optical coherence tomography

Feng Yu Chang, Meng Tsan Tsai*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A new approach for defect inspection and properties evaluation of indium tin oxide (ITO) conducting glass is demonstrated with optical coherence tomography (OCT). With OCT scanning, the defects can be clearly identified at the different depths. Besides the morphological information, several parameters also can be estimated including the thickness of glass, group refractive index, reflection coefficient and transmission coefficient, which can be used to evaluate the quality of ITO conducting glass. From the results, one can see that OCT could be a potential imaging tool for defect inspection of ITO conducting glass or other industrial products.

Original languageEnglish
Title of host publicationQuantum Electronics and Laser Science Conference, QELS 2011
StatePublished - 2011
EventQuantum Electronics and Laser Science Conference, QELS 2011 - Baltimore, MD, United States
Duration: 01 05 201106 05 2011

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceQuantum Electronics and Laser Science Conference, QELS 2011
Country/TerritoryUnited States
CityBaltimore, MD
Period01/05/1106/05/11

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