TY - GEN
T1 - Optical inspection of ITO conducting glass with optical coherence tomography
AU - Chang, Feng Yu
AU - Tsai, Meng Tsan
PY - 2011
Y1 - 2011
N2 - A new approach for defect inspection and properties evaluation of indium tin oxide (ITO) conducting glass is demonstrated with optical coherence tomography (OCT). With OCT scanning, the defects can be clearly identified at the different depths. Besides the morphological information, several parameters also can be estimated including the thickness of glass, group refractive index, reflection coefficient and transmission coefficient, which can be used to evaluate the quality of ITO conducting glass. From the results, one can see that OCT could be a potential imaging tool for defect inspection of ITO conducting glass or other industrial products.
AB - A new approach for defect inspection and properties evaluation of indium tin oxide (ITO) conducting glass is demonstrated with optical coherence tomography (OCT). With OCT scanning, the defects can be clearly identified at the different depths. Besides the morphological information, several parameters also can be estimated including the thickness of glass, group refractive index, reflection coefficient and transmission coefficient, which can be used to evaluate the quality of ITO conducting glass. From the results, one can see that OCT could be a potential imaging tool for defect inspection of ITO conducting glass or other industrial products.
UR - https://www.scopus.com/pages/publications/84894044129
M3 - 会议稿件
AN - SCOPUS:84894044129
SN - 9781557529107
T3 - Optics InfoBase Conference Papers
BT - Quantum Electronics and Laser Science Conference, QELS 2011
T2 - Quantum Electronics and Laser Science Conference, QELS 2011
Y2 - 1 May 2011 through 6 May 2011
ER -