@inproceedings{b91893ac1df6457d862b63000355ff0b,
title = "Optimization of DC-sputtered molybdenum back contact layers",
abstract = "The Mo back contact layers were deposited by DC sputtering to investigate into that optimization the properties for CIGS solar cells. The working pressure and thickness of Mo thin films were varied during deposited process. When the working pressure at 1.5 mtorr and thickness of Mo thin films at 1000 nm, the properties of Mo thin films were best. The FWHM about 0.5° and electrical resistivity can arrive about 2.5 × 10-5 Ω-cm.",
keywords = "CIGS solr cell, DC sputtering, Mo back contact layers",
author = "Jiang, {Jhong Hao} and Kuo, {Shou Yi}",
year = "2014",
doi = "10.1109/ISNE.2014.6839351",
language = "英语",
isbn = "9781479947805",
series = "2014 International Symposium on Next-Generation Electronics, ISNE 2014",
publisher = "IEEE Computer Society",
booktitle = "2014 International Symposium on Next-Generation Electronics, ISNE 2014",
address = "美国",
note = "3rd International Symposium on Next-Generation Electronics, ISNE 2014 ; Conference date: 07-05-2014 Through 10-05-2014",
}