Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

Shou Yi Kuo; Ming Jer Jeng; Liann Be Chang; Wei Ting Lin; Sung Cheng Hu; Yung Tien Lu; Ching Wen Wu

doi:10.1109/PVSC.2009.5411612

Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

Shou Yi Kuo^*
, Ming Jer Jeng
, Liann Be Chang
, Wei Ting Lin
, Sung Cheng Hu
, Yung Tien Lu
, Ching Wen Wu

^*Corresponding author for this work

Chang Gung University
Chung-shan Institute of Science and Technology Taiwan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

In this article, we report the fabrication and characterization of molybdenum (Mo) thin films on soda-lime glass substrate grown by reactive RF magnetron sputtering for Cu(ln,Ga)Se ₂ thin film solar cells. It was found that the growth parameters, such as argon flow rate, RF power, bi-Iayer of Mo thin films and substrate temperature, have significant influences on properties of Mo films. As the argon flow rate was increased, the sheet resistance of Mo films increase, and the strain were changed from tensile to compressive. Higher RF power leads to a decrease on sheet resistance, and the optimal thickness and sheet resistance are 1 μm and 0.2 Ωl□. In addition, our experimental results proved that the increase of substrate temperature will lead to better adhesion of Mo thin film with glass substrate, and lower sheet resistance (0.11-0.14 Ω/□).

Original language	English
Title of host publication	2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009
Pages	594-596
Number of pages	3
DOIs	https://doi.org/10.1109/PVSC.2009.5411612
State	Published - 2009
Event	2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 - Philadelphia, PA, United States Duration: 07 06 2009 → 12 06 2009

Publication series

Name	Conference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)	0160-8371

Conference

Conference	2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009
Country/Territory	United States
City	Philadelphia, PA
Period	07/06/09 → 12/06/09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

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10.1109/PVSC.2009.5411612

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Kuo, S. Y., Jeng, M. J., Chang, L. B., Lin, W. T., Hu, S. C., Lu, Y. T., & Wu, C. W. (2009). Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering. In 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 (pp. 594-596). Article 5411612 (Conference Record of the IEEE Photovoltaic Specialists Conference). https://doi.org/10.1109/PVSC.2009.5411612

@inproceedings{c877acc6330b48c884e853416171e6dc,

title = "Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering",

abstract = "In this article, we report the fabrication and characterization of molybdenum (Mo) thin films on soda-lime glass substrate grown by reactive RF magnetron sputtering for Cu(ln,Ga)Se 2 thin film solar cells. It was found that the growth parameters, such as argon flow rate, RF power, bi-Iayer of Mo thin films and substrate temperature, have significant influences on properties of Mo films. As the argon flow rate was increased, the sheet resistance of Mo films increase, and the strain were changed from tensile to compressive. Higher RF power leads to a decrease on sheet resistance, and the optimal thickness and sheet resistance are 1 μm and 0.2 Ωl□. In addition, our experimental results proved that the increase of substrate temperature will lead to better adhesion of Mo thin film with glass substrate, and lower sheet resistance (0.11-0.14 Ω/□).",

author = "Kuo, \{Shou Yi\} and Jeng, \{Ming Jer\} and Chang, \{Liann Be\} and Lin, \{Wei Ting\} and Hu, \{Sung Cheng\} and Lu, \{Yung Tien\} and Wu, \{Ching Wen\}",

year = "2009",

doi = "10.1109/PVSC.2009.5411612",

language = "英语",

isbn = "9781424429509",

series = "Conference Record of the IEEE Photovoltaic Specialists Conference",

pages = "594--596",

booktitle = "2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009",

note = "2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 ; Conference date: 07-06-2009 Through 12-06-2009",

}

Kuo, SY, Jeng, MJ, Chang, LB, Lin, WT, Hu, SC, Lu, YT & Wu, CW 2009, Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering. in 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009., 5411612, Conference Record of the IEEE Photovoltaic Specialists Conference, pp. 594-596, 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009, Philadelphia, PA, United States, 07/06/09. https://doi.org/10.1109/PVSC.2009.5411612

Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering. / Kuo, Shou Yi; Jeng, Ming Jer; Chang, Liann Be et al.
2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009. 2009. p. 594-596 5411612 (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

AU - Kuo, Shou Yi

AU - Jeng, Ming Jer

AU - Chang, Liann Be

AU - Lin, Wei Ting

AU - Hu, Sung Cheng

AU - Lu, Yung Tien

AU - Wu, Ching Wen

PY - 2009

Y1 - 2009

N2 - In this article, we report the fabrication and characterization of molybdenum (Mo) thin films on soda-lime glass substrate grown by reactive RF magnetron sputtering for Cu(ln,Ga)Se 2 thin film solar cells. It was found that the growth parameters, such as argon flow rate, RF power, bi-Iayer of Mo thin films and substrate temperature, have significant influences on properties of Mo films. As the argon flow rate was increased, the sheet resistance of Mo films increase, and the strain were changed from tensile to compressive. Higher RF power leads to a decrease on sheet resistance, and the optimal thickness and sheet resistance are 1 μm and 0.2 Ωl□. In addition, our experimental results proved that the increase of substrate temperature will lead to better adhesion of Mo thin film with glass substrate, and lower sheet resistance (0.11-0.14 Ω/□).

AB - In this article, we report the fabrication and characterization of molybdenum (Mo) thin films on soda-lime glass substrate grown by reactive RF magnetron sputtering for Cu(ln,Ga)Se 2 thin film solar cells. It was found that the growth parameters, such as argon flow rate, RF power, bi-Iayer of Mo thin films and substrate temperature, have significant influences on properties of Mo films. As the argon flow rate was increased, the sheet resistance of Mo films increase, and the strain were changed from tensile to compressive. Higher RF power leads to a decrease on sheet resistance, and the optimal thickness and sheet resistance are 1 μm and 0.2 Ωl□. In addition, our experimental results proved that the increase of substrate temperature will lead to better adhesion of Mo thin film with glass substrate, and lower sheet resistance (0.11-0.14 Ω/□).

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SN - 9781424429509

T3 - Conference Record of the IEEE Photovoltaic Specialists Conference

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BT - 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009

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ER -

Kuo SY, Jeng MJ, Chang LB, Lin WT, Hu SC, Lu YT et al. Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering. In 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009. 2009. p. 594-596. 5411612. (Conference Record of the IEEE Photovoltaic Specialists Conference). doi: 10.1109/PVSC.2009.5411612

Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

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