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Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering
Shou Yi Kuo*, Ming Jer Jeng, Liann Be Chang, Wei Ting Lin, Sung Cheng Hu, Yung Tien Lu, Ching Wen Wu
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
4
Scopus
citations