Oxidation and wear behaviors of Ti-based thin films

The degradation of Ti-based coatings is known to be due to the formation of titanium oxide (TiO₂) at their surfaces. In this study, wear and thermal oxidation behaviors of various magnetron sputtered Ti-based thin films were studied after static oxidation and sliding wear. The oxidized surfaces after the static oxidation and the wear debris generated from pin-on-disc wear tests with alumina ball were characterized to identify the compounds, particularly titanium oxides, to gain a better understanding of the tribochemical reactions. The coatings that were examined include TiN, TiCN (N rich), TiCN (C rich), TiAlN, AlTiN, TiSiN, and TiCNO thin films. These coatings were characterized using Raman spectroscopy, scanning electron microscopy, and X-Ray diffractometer. The results show that TiSiN and AlTiN have the highest oxidation resistance, comparing with other coatings. As for the analyses of wear debris, all of the Ti-based coatings are worn by the mechanism of forming TiO₂, except AlTiN. AlTiN is worn by ploughing wear.