Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes

Chia Hua Chan; Chia Hung Hou; Chih Kai Huang; Tsing Jen Chen; Shao Ze Tseng; Hung Ta Chien; Cheng Huang Kuo; Kuo Huang Hsieh; Yen Ling Tsai; Kuei Chu Hsu; Chii Chang Chen

doi:10.1143/JJAP.48.020212

Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes

Chia Hua Chan^*, Chia Hung Hou, Chih Kai Huang, Tsing Jen Chen, Shao Ze Tseng, Hung Ta Chien, Cheng Huang Kuo, Kuo Huang Hsieh, Yen Ling Tsai, Kuei Chu Hsu, Chii Chang Chen

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

16 Scopus citations

Abstract

In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.

Original language	English
Article number	020212
Journal	Japanese Journal of Applied Physics
Volume	48
Issue number	2
DOIs	https://doi.org/10.1143/JJAP.48.020212
State	Published - 02 2009
Externally published	Yes

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title = "Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes",

abstract = "In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.",

author = "Chan, {Chia Hua} and Hou, {Chia Hung} and Huang, {Chih Kai} and Chen, {Tsing Jen} and Tseng, {Shao Ze} and Chien, {Hung Ta} and Kuo, {Cheng Huang} and Hsieh, {Kuo Huang} and Tsai, {Yen Ling} and Hsu, {Kuei Chu} and Chen, {Chii Chang}",

year = "2009",

month = feb,

doi = "10.1143/JJAP.48.020212",

language = "英语",

volume = "48",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - Patterning periodical motif on substrates using monolayer of microspheres

T2 - Application in GaN light-emitting diodes

AU - Chan, Chia Hua

AU - Hou, Chia Hung

AU - Huang, Chih Kai

AU - Chen, Tsing Jen

AU - Tseng, Shao Ze

AU - Chien, Hung Ta

AU - Kuo, Cheng Huang

AU - Hsieh, Kuo Huang

AU - Tsai, Yen Ling

AU - Hsu, Kuei Chu

AU - Chen, Chii Chang

PY - 2009/2

Y1 - 2009/2

N2 - In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.

AB - In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.

UR - http://www.scopus.com/inward/record.url?scp=60849130131&partnerID=8YFLogxK

U2 - 10.1143/JJAP.48.020212

DO - 10.1143/JJAP.48.020212

M3 - 文章

AN - SCOPUS:60849130131

SN - 0021-4922

VL - 48

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 2

M1 - 020212

ER -

Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes

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