Performance evaluation of cleaning solutions enhanced with tetraalkylammonium hydroxide substituents for post-CMP cleaning on poly-Si film

Tung Ming Pan, Tan Fu Lei, Fu Hsiang Ko, Tien Sheng Chao*, Ming Chi Liaw, Ying Hao Lee, Chih Peng Lud

*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

13 Scopus citations

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