@conference{7fd424ecc0ec45e2a0d4856372148dac,
title = "pH-sensing Characterization of Programmable Sm2O3/Si3N4/SiO2/Si EIS Sensor with Rapid Thermal Annealing",
author = "Tseng-Fu Lu and Jer-Chyi Wang and Hui-Yu Shih and Chia-Ming Yang and Chieh-Hung Chuang and Chao-Sung Lai and Chyuan-Haur Kao and Tung-Ming Pan",
year = "2011",
language = "American English",
note = "2011 International Workshop on Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-11) ; Conference date: 20-01-2011 Through 21-01-2011",
}