Physical and Electrical Properties of High-k Tb2O3,TbTixOy and YbTixOy dielectrics SONOS-type memory devices

鍾濟行

Research output: Types of ThesisMaster's thesis

Translated title of the contribution高介電常數材料三氧化二鋱,鋱鈦氧化物與鐿鈦氧化物應用在矽-氧化矽-氮化矽-氧化矽-矽堆疊結構形式之記憶體之物性及電性分析
Original languageAmerican English
Supervisors/Advisors
  • Pan, Tung-Ming, Supervisor
StatePublished - 2009
Externally publishedYes

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