Physical properties of copper oxide thin films prepared by dc reactive magnetron sputtering under different oxygen partial pressures

Yu-Hsiang Wang, Chi-You Lai, Chen-Yang Lo, Hsin-Chun Lu

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2009
Event	the International Conference in Semiconductors-25 - saint petersburg Duration: 20 07 2009 → 24 07 2009

Conference	the International Conference in Semiconductors-25
Period	20/07/09 → 24/07/09

Cite this

@conference{40d513bbb9e9461099162d93fe850ddb,

title = "Physical properties of copper oxide thin films prepared by dc reactive magnetron sputtering under different oxygen partial pressures",

author = "Yu-Hsiang Wang and Chi-You Lai and Chen-Yang Lo and Hsin-Chun Lu",

year = "2009",

language = "American English",

note = "the International Conference in Semiconductors-25 ; Conference date: 20-07-2009 Through 24-07-2009",

}