Physical properties of MgZnO film grown by RF magnetron sputtering using ZnO/MgO (80/20 wt%) target

Kuang Po Hsueh*, Chun Ju Tun, Hsien Chin Chiu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This work investigates the physical properties of the MgxZn 1-xO films. MgxZn1-xO films were deposited by RF magnetron sputtering system using a 6 inch ZnO/MgO (80/20 wt%) target. The XPS, Hall measurement, and transparent performance are measured. The XPS results show that there is high Carbon element content on the surface of Mg xZn1-xO maybe due to the contamination and the average of the Mg content is about 25 at. %. The XRD results indicate that the appearance of only (111) peaks for as-grown MgxZn1-xO film is a sign of the cubic single phase. In this study, the MgxZn1-xO film show high transparency with transmittances over 90 % in the visible region (400 ∼ 700nm) and the sharp absorption edge is visible in UV region due to the Mg content. Therefore, the Hall measurement of MgxZn 1-xO films which were deposited at lower RF power show the higher doping concentration, the lower resistivity and higher mobility as a function of the annealing temperatures. The experimental results indicate that Mg xZn1-xO film with 800°C annealing contains more oxygen vacancies which play the role of donor. Since oxygen vacancies generate states in the band gap and cause an increase in conductivity.

Original languageEnglish
Title of host publicationOxide-based Materials and Devices
DOIs
StatePublished - 2010
EventOxide-based Materials and Devices - San Francisco, CA, United States
Duration: 24 01 201027 01 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7603
ISSN (Print)0277-786X

Conference

ConferenceOxide-based Materials and Devices
Country/TerritoryUnited States
CitySan Francisco, CA
Period24/01/1027/01/10

Keywords

  • MgO
  • Sputtering system
  • Transparent conductive oxide
  • Transparent performance
  • X-ray diffraction
  • X-ray photoelectron spectroscopy
  • ZnO

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