Polyoxide and Thin Film Transistor Fabricated by MILC and CF4 Plasma

李紀賢

Research output: Types of ThesisMaster's thesis

Translated title of the contribution使用金屬誘發側向再結晶結合四氟化碳電漿來研製複晶矽氧化層與薄膜電晶體
Original languageAmerican English
Supervisors/Advisors
  • Kao, Chyuan-Haur, Supervisor
StatePublished - 2008
Externally publishedYes

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