TY - GEN
T1 - Preparation and application of sub-micron lead zirconium titanate surface acoustic wave biosensors
AU - Lu, Hsin Chun
AU - Lai, Wai Kit
AU - Young, Hsin Chieh
PY - 2010
Y1 - 2010
N2 - This paper presents the preparation of piezoelectric lead zirconium titanate (PZT) thick films and the fabrication of PZT surface acoustic waves (SAW) devices with sub-micron IDT electrodes by the micro-powder-sol-gel method. The utilization of these PZT SAW devices as biosensors to detect human IgG is also reported. From the experimental results, it was found that PZT thick films prepared from the precursor coating slurry solutions made from PZT micro-powders calcined at 550°C for 90 minutes have best electrical properties (εr=1889.355, Pr=29.3 μC/cm2, Ec=32.4 kV/cm, d31=-418.580 pC/N, d33=916.681 pC/N at 1kHz) after being annealed at 600°C for 1 hour. The central frequency and the insertion loss of PZT SAW devices prepared from PZT films mentioned above are 2.30 GHz and 16.14 dB, respectively. When used for the actual detection of human IgG, the detection of limit of PZT SAW biosensors is 10-9 g / ml and is better than that of the QCM (10-7 g/ml) under the same immobilization and sensing conditions.
AB - This paper presents the preparation of piezoelectric lead zirconium titanate (PZT) thick films and the fabrication of PZT surface acoustic waves (SAW) devices with sub-micron IDT electrodes by the micro-powder-sol-gel method. The utilization of these PZT SAW devices as biosensors to detect human IgG is also reported. From the experimental results, it was found that PZT thick films prepared from the precursor coating slurry solutions made from PZT micro-powders calcined at 550°C for 90 minutes have best electrical properties (εr=1889.355, Pr=29.3 μC/cm2, Ec=32.4 kV/cm, d31=-418.580 pC/N, d33=916.681 pC/N at 1kHz) after being annealed at 600°C for 1 hour. The central frequency and the insertion loss of PZT SAW devices prepared from PZT films mentioned above are 2.30 GHz and 16.14 dB, respectively. When used for the actual detection of human IgG, the detection of limit of PZT SAW biosensors is 10-9 g / ml and is better than that of the QCM (10-7 g/ml) under the same immobilization and sensing conditions.
UR - https://www.scopus.com/pages/publications/77951653869
U2 - 10.1109/INEC.2010.5424928
DO - 10.1109/INEC.2010.5424928
M3 - 会议稿件
AN - SCOPUS:77951653869
SN - 9781424435449
T3 - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
SP - 1240
EP - 1241
BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
T2 - 2010 3rd International Nanoelectronics Conference, INEC 2010
Y2 - 3 January 2010 through 8 January 2010
ER -