| Translated title of the contribution | 動態隨機記憶體之製程整合與元件特性改善之應用研究--微秒快閃回火及液相沉積氧化層 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2009 |
| Externally published | Yes |
Process integration of devices improvement in DRAM application by millisecond flash anneal and liquid phase deposition oxide
林瑄智
Research output: Types of Thesis › Doctoral thesis