Abstract
Sarcosine as a prostate cancer biomarker has been detected by using Si naowire based electrolyte/NiOx/SiO2/n-Si sensor for the first time. A long nanowire (14 m) by chemically etched is observed by scanning electron microscope (SEM) images. A 2 nm-thick NiOx membrane on SiO2/n-Si structure shows low concentration of 1 pM H2O2 sensing as well as sarcosine of 10 pM has been detected because Ni2+ oxidation state changes to Ni3+ state.
Original language | English |
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Title of host publication | 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1-2 |
Number of pages | 2 |
ISBN (Electronic) | 9781538648254 |
DOIs | |
State | Published - 03 07 2018 |
Event | 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018 - Hsinchu, Taiwan Duration: 16 04 2018 → 19 04 2018 |
Publication series
Name | 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018 |
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Conference
Conference | 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018 |
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Country/Territory | Taiwan |
City | Hsinchu |
Period | 16/04/18 → 19/04/18 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.