TY - JOUR
T1 - Rare earth doped high barrier height Schottky devices
AU - Chang, L. B.
AU - Wang, H. T.
AU - Cheng, Y. C.
AU - Shong, T. W.
AU - Lin, E. K.
PY - 1999/6
Y1 - 1999/6
N2 - Intrinsic semiconductor epilayer are frequently adopted in power devices to increase their BV and decrease their leakage current. High purity Pr2O3-added GaAs liquid phase epitaxial layers are grown with low background carrier concentrations. Their surface chemical structures are investigated by using X-ray photoelectron spectroscopy. As the surface oxidation is lowered, these (Au, Ag, Ni, Pt)/GaAs Schottky structures all show an improved diode property by addition of Pr2O3. The resulting barrier height and ideality factor can be as high as 0.94±0.02 eV and as unitary as 1.03±0.01, respectively. A leakage current of around 0.7×10-6 A and a breakdown voltage of 140 V is also obtained. These grown SDs were also irradiated by gamma-ray for the study of radiation hardness. After 4 h irradiation, all samples are out of function at beginning. However, 4 h latter, because of the nature annealing, the SBH of those added samples can recover to 72% of their original SBH values. Further, another 24 h past, the tendency of recovery is saturated and a 19% SBH retard is still left. During this period, the appropriate Pr2O3-added SDs show out better radiation hardness property with compare to the unadded one.
AB - Intrinsic semiconductor epilayer are frequently adopted in power devices to increase their BV and decrease their leakage current. High purity Pr2O3-added GaAs liquid phase epitaxial layers are grown with low background carrier concentrations. Their surface chemical structures are investigated by using X-ray photoelectron spectroscopy. As the surface oxidation is lowered, these (Au, Ag, Ni, Pt)/GaAs Schottky structures all show an improved diode property by addition of Pr2O3. The resulting barrier height and ideality factor can be as high as 0.94±0.02 eV and as unitary as 1.03±0.01, respectively. A leakage current of around 0.7×10-6 A and a breakdown voltage of 140 V is also obtained. These grown SDs were also irradiated by gamma-ray for the study of radiation hardness. After 4 h irradiation, all samples are out of function at beginning. However, 4 h latter, because of the nature annealing, the SBH of those added samples can recover to 72% of their original SBH values. Further, another 24 h past, the tendency of recovery is saturated and a 19% SBH retard is still left. During this period, the appropriate Pr2O3-added SDs show out better radiation hardness property with compare to the unadded one.
UR - http://www.scopus.com/inward/record.url?scp=0032634277&partnerID=8YFLogxK
U2 - 10.1016/S0026-2692(98)00174-8
DO - 10.1016/S0026-2692(98)00174-8
M3 - 会议文章
AN - SCOPUS:0032634277
SN - 0026-2692
VL - 30
SP - 521
EP - 526
JO - Microelectronics Journal
JF - Microelectronics Journal
IS - 6
ER -