Rare earth doped high barrier height Schottky devices

L. B. Chang*, H. T. Wang, Y. C. Cheng, T. W. Shong, E. K. Lin

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

Intrinsic semiconductor epilayer are frequently adopted in power devices to increase their BV and decrease their leakage current. High purity Pr2O3-added GaAs liquid phase epitaxial layers are grown with low background carrier concentrations. Their surface chemical structures are investigated by using X-ray photoelectron spectroscopy. As the surface oxidation is lowered, these (Au, Ag, Ni, Pt)/GaAs Schottky structures all show an improved diode property by addition of Pr2O3. The resulting barrier height and ideality factor can be as high as 0.94±0.02 eV and as unitary as 1.03±0.01, respectively. A leakage current of around 0.7×10-6 A and a breakdown voltage of 140 V is also obtained. These grown SDs were also irradiated by gamma-ray for the study of radiation hardness. After 4 h irradiation, all samples are out of function at beginning. However, 4 h latter, because of the nature annealing, the SBH of those added samples can recover to 72% of their original SBH values. Further, another 24 h past, the tendency of recovery is saturated and a 19% SBH retard is still left. During this period, the appropriate Pr2O3-added SDs show out better radiation hardness property with compare to the unadded one.

Original languageEnglish
Pages (from-to)521-526
Number of pages6
JournalMicroelectronics Journal
Volume30
Issue number6
DOIs
StatePublished - 06 1999
Externally publishedYes

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