Reaction-inhibited interfacial coating between PEDOT:PSS sensing membrane and ITO electrode for highly-reliable piezoresistive pressure sensing applications

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Abstract

Background: Poly(3,4-ethylenedioxythiophene):poly-(styrenesulfonate) (PEDOT:PSS) is a promising conductive polymer for the flexible piezoresistive pressure sensor. However, intrinsic hydrophilicity is detrimental to its structural stability under moisture. The present study aims to enhance piezoresistive pressure sensors' stability to achieve the highly-reliable electronic device applications. Method: ITO/PEDOT:PSS/ITO piezoresistive pressure sensors with an interdigitated electrode (IDE) structure and different metallic interfacial layers were fabricated. Au layer was introduced between PEDOT:PSS sensing membrane and indium tin oxide (ITO) electrode as a reaction-inhibited interfacial coating of piezoresistive pressure sensors. Significant findings: After a measurement time interval of 6 months, the interface reaction suppressed significantly, resulting in low sensitivity deviation (9.22%) and improved durability (400 cycles). The devices are completely sealed using polyethylene terephthalate packaging, avoiding humidity absorption in PEDOT:PSS films successfully. The packaged ITO/PEDOT:PSS/ITO piezoresistive pressure sensors with a double-sided 10-nm-thick Au interfacial layer is a promising candidate for use in highly reliable pressure sensing applications.

Original languageEnglish
Pages (from-to)297-306
Number of pages10
JournalJournal of the Taiwan Institute of Chemical Engineers
Volume126
DOIs
StatePublished - 09 2021

Bibliographical note

Publisher Copyright:
© 2021 Taiwan Institute of Chemical Engineers

Keywords

  • Poly(3,4-ethylenedioxythiophene): poly-(styrenesulfonate) (PEDOT:PSS), Indium tin oxide (ITO), Piezoresistive pressure sensor, Interfacial coating, Polyethylene terephthalate (PET), Package

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