Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques

Chin Hwa Lin, Chien Chou, Keh Su Chang

Research output: Contribution to journalJournal Article peer-review

49 Scopus citations

Abstract

In this paper, we have combined a Mach-Zehnder interferometer and an optical heterodyne using an AO modulator to set up an interferometric ellipsometer for measuring the optical properties of metal surfaces. Because there is no moving mechanism, e.g., compensators and quarterwave plates, we can eliminate the errors caused by these elements. By using a phase lock-in technique and computer processing, we can measure parameters ψ and ∆ in real time and with great accuracy (where ’k is the amplitude ratio of the P- and S-waves, and ∆ is the phase difference in the P- and S-waves).

Original languageEnglish
Pages (from-to)5159-5162
Number of pages4
JournalApplied Optics
Volume29
Issue number34
DOIs
StatePublished - 12 1990
Externally publishedYes

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