Recovery and Boron Activation in Implanted Germanium

周政輝

Research output: Types of ThesisMaster's thesis

Translated title of the contribution離子植入鍺晶片之回復與硼摻雜活化
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2015
Externally publishedYes

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