Residual clamping force and dynamic random access memory data retention improved by gate tungsten etch dechucking condition in a bipolar electrostatic chuck

Chung Yuan Lee*, Chao Sung Lai, Chia Ming Yang, David H.L. Wang, Betty Lin, Siimon Lee, Chi Hung Huang, Chen Chang Wei

*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

3 Scopus citations

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