Retention Amelioration of Oxygen Plasma Immersion Ion Implantation Treated Tungsten Nanocrystal Nonvolatile Memory

Jer-Chyi Wang

Retention Amelioration of Oxygen Plasma Immersion Ion Implantation Treated Tungsten Nanocrystal Nonvolatile Memory

Department of Electronic Engineering

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2012
Event	Asia-Pacific Conference on Plasma Science and Technology (APCPST) and Symposium of Plasma Science for Materials (SPSM), 2012 - Kyoto, Japan Duration: 02 10 2012 → 05 10 2012

Conference

Conference	Asia-Pacific Conference on Plasma Science and Technology (APCPST) and Symposium of Plasma Science for Materials (SPSM), 2012
Period	02/10/12 → 05/10/12

Cite this

@conference{6220f457705e45428db8b93270d5528f,

title = "Retention Amelioration of Oxygen Plasma Immersion Ion Implantation Treated Tungsten Nanocrystal Nonvolatile Memory",

author = "Jer-Chyi Wang",

year = "2012",

language = "American English",

note = "Asia-Pacific Conference on Plasma Science and Technology (APCPST) and Symposium of Plasma Science for Materials (SPSM), 2012 ; Conference date: 02-10-2012 Through 05-10-2012",

}