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RFIC TaN/SrTiO 3/TaN MIM capacitors with 35 fF/μm 2 capacitance density
C. C. Huang*, K. C. Chiang, H. L. Kao, Albert Chin, W. J. Chen
*Corresponding author for this work
Research output: Contribution to journal › Journal Article › peer-review
9
Scopus
citations