Sensitivity of residual stress to moisture penetration on optical thin films

Hong Jueng King; Bor Ming Lee; Ching An Shao; Chien Chou; Fu Pen Chiang

doi:10.1143/JJAP.32.155

Sensitivity of residual stress to moisture penetration on optical thin films

Hong Jueng King, Bor Ming Lee, Ching An Shao, Chien Chou, Fu Pen Chiang

Research output: Contribution to journal › Journal Article › peer-review

Abstract

A Michels on-type, whole-field residual stress measurement method has been set up. From this method, two- dimensional out-of-plane partial slope contours of optical thin films were obtained. The linear and the rotational mismatch techniques in the experiment help to improve the sensitivity of measurement and determine the signs of residual stress. Whether aluminum film, the most popular material used in reflective optical components, is coated with protective layers (SiO or MgF₂) or not, exposure to the background humidity is unavoidable because moisture penetrates into aluminum film. In this paper, we point out that the residual stress of aluminum film changes drastically because of moisture absorption. This highly sensitive residual stress measurement method also shows that protective layers cannot prevent moisture penetration.

Original language	English
Pages (from-to)	155-161
Number of pages	7
Journal	Japanese Journal of Applied Physics
Volume	32
Issue number	1 R
DOIs	https://doi.org/10.1143/JJAP.32.155
State	Published - 01 1993
Externally published	Yes

Keywords

Moiré
Optical thin films
Residual stress

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10.1143/JJAP.32.155

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title = "Sensitivity of residual stress to moisture penetration on optical thin films",

abstract = "A Michels on-type, whole-field residual stress measurement method has been set up. From this method, two- dimensional out-of-plane partial slope contours of optical thin films were obtained. The linear and the rotational mismatch techniques in the experiment help to improve the sensitivity of measurement and determine the signs of residual stress. Whether aluminum film, the most popular material used in reflective optical components, is coated with protective layers (SiO or MgF2) or not, exposure to the background humidity is unavoidable because moisture penetrates into aluminum film. In this paper, we point out that the residual stress of aluminum film changes drastically because of moisture absorption. This highly sensitive residual stress measurement method also shows that protective layers cannot prevent moisture penetration.",

keywords = "Moir{\'e}, Optical thin films, Residual stress",

author = "King, {Hong Jueng} and Lee, {Bor Ming} and Shao, {Ching An} and Chien Chou and Chiang, {Fu Pen}",

year = "1993",

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AU - King, Hong Jueng

AU - Lee, Bor Ming

AU - Shao, Ching An

AU - Chou, Chien

AU - Chiang, Fu Pen

PY - 1993/1

Y1 - 1993/1

N2 - A Michels on-type, whole-field residual stress measurement method has been set up. From this method, two- dimensional out-of-plane partial slope contours of optical thin films were obtained. The linear and the rotational mismatch techniques in the experiment help to improve the sensitivity of measurement and determine the signs of residual stress. Whether aluminum film, the most popular material used in reflective optical components, is coated with protective layers (SiO or MgF2) or not, exposure to the background humidity is unavoidable because moisture penetrates into aluminum film. In this paper, we point out that the residual stress of aluminum film changes drastically because of moisture absorption. This highly sensitive residual stress measurement method also shows that protective layers cannot prevent moisture penetration.

AB - A Michels on-type, whole-field residual stress measurement method has been set up. From this method, two- dimensional out-of-plane partial slope contours of optical thin films were obtained. The linear and the rotational mismatch techniques in the experiment help to improve the sensitivity of measurement and determine the signs of residual stress. Whether aluminum film, the most popular material used in reflective optical components, is coated with protective layers (SiO or MgF2) or not, exposure to the background humidity is unavoidable because moisture penetrates into aluminum film. In this paper, we point out that the residual stress of aluminum film changes drastically because of moisture absorption. This highly sensitive residual stress measurement method also shows that protective layers cannot prevent moisture penetration.

KW - Moiré

KW - Optical thin films

KW - Residual stress

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DO - 10.1143/JJAP.32.155

M3 - 文章

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SN - 0021-4922

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SP - 155

EP - 161

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 1 R

ER -

Sensitivity of residual stress to moisture penetration on optical thin films

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Keywords

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