Abstract
This paper reports an innovative approach for the manipulation of micro-particles utilizing optically-induced dielectrophoresis (ODEP), which was generated by a flexible polymer-based substrate for biomedical applications. The ODEP platform fabricated on a thin-film polymer-based substrate has been reported as a promising technique for particle/cell manipulation. Without using sophisticate and high-temperature thin-film process, the entire fabrication process can be performed at low-temperature and completed in a shorter period of time when compared with the fabrication process of amorphous silicon. In this study, we fabricated the ODEP device on a flexible substrate, which may further extend its practical applications. In addition, the rapid separation of micro-particles can be realized with the incorporation of gravity effect utilizing the arch-shaped flexible substrate. More importantly, the fabrication process was compatible with the roll-to-roll process such that large-area, flexible polymer substrates can be adopted for further applications such as concentration, transportation and separation of micro-particles/cells. The novel fabrication process using the flexible substrate may provide a promising and cost-effective approach for mass-production of the ODEP devices.
| Original language | English |
|---|---|
| Title of host publication | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
| Pages | 1181-1184 |
| Number of pages | 4 |
| DOIs | |
| State | Published - 2011 |
| Event | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 01 2011 → 27 01 2011 |
Publication series
| Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| ISSN (Print) | 1084-6999 |
Conference
| Conference | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
|---|---|
| Country/Territory | Mexico |
| City | Cancun |
| Period | 23/01/11 → 27/01/11 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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