SF6 plasma-Assisted Au nanostructure formation for LSPR sensing

Chih Ching Ho; Chia Ming Yang

doi:10.1117/12.2690425

SF6 plasma-Assisted Au nanostructure formation for LSPR sensing

Chih Ching Ho, Chia Ming Yang

Graduate Institute of Electro-Optical Engineering

Chang Gung University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.

Original language	English
Title of host publication	Functional Material Applications
Subtitle of host publication	From Energy to Sensing
Editors	Alistair H. Kean, Nikhil Bhalla
Publisher	SPIE
ISBN (Electronic)	9781510668454
DOIs	https://doi.org/10.1117/12.2690425
State	Published - 2023
Event	Functional Material Applications: From Energy to Sensing 2023 - Glasgow, United Kingdom Duration: 24 10 2023 → 25 10 2023

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	12796
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Functional Material Applications: From Energy to Sensing 2023
Country/Territory	United Kingdom
City	Glasgow
Period	24/10/23 → 25/10/23

Bibliographical note

Publisher Copyright:
© 2023 SPIE. All rights reserved.

Keywords

biosensing
LSPR
nanostructure
surface modification

Access to Document

10.1117/12.2690425

Cite this

@inproceedings{536ce1f52a594c43b02343613aa072a5,

title = "SF6 plasma-Assisted Au nanostructure formation for LSPR sensing",

abstract = "LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.",

keywords = "biosensing, LSPR, nanostructure, surface modification",

author = "Ho, {Chih Ching} and Yang, {Chia Ming}",

year = "2023",

doi = "10.1117/12.2690425",

language = "英语",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Kean, {Alistair H.} and Nikhil Bhalla",

booktitle = "Functional Material Applications",

address = "美国",

}

Ho, CC & Yang, CM 2023, SF6 plasma-Assisted Au nanostructure formation for LSPR sensing. in AH Kean & N Bhalla (eds), Functional Material Applications: From Energy to Sensing., 1279607, Proceedings of SPIE - The International Society for Optical Engineering, vol. 12796, SPIE, Functional Material Applications: From Energy to Sensing 2023, Glasgow, United Kingdom, 24/10/23. https://doi.org/10.1117/12.2690425

SF6 plasma-Assisted Au nanostructure formation for LSPR sensing. / Ho, Chih Ching; Yang, Chia Ming.
Functional Material Applications: From Energy to Sensing. ed. / Alistair H. Kean; Nikhil Bhalla. SPIE, 2023. 1279607 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12796).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - SF6 plasma-Assisted Au nanostructure formation for LSPR sensing

AU - Ho, Chih Ching

AU - Yang, Chia Ming

PY - 2023

Y1 - 2023

N2 - LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.

AB - LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.

KW - biosensing

KW - LSPR

KW - nanostructure

KW - surface modification

UR - http://www.scopus.com/inward/record.url?scp=85179587325&partnerID=8YFLogxK

U2 - 10.1117/12.2690425

DO - 10.1117/12.2690425

M3 - 会议稿件

AN - SCOPUS:85179587325

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Functional Material Applications

A2 - Kean, Alistair H.

A2 - Bhalla, Nikhil

PB - SPIE

T2 - Functional Material Applications: From Energy to Sensing 2023

Y2 - 24 October 2023 through 25 October 2023

ER -

SF6 plasma-Assisted Au nanostructure formation for LSPR sensing

Abstract

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Keywords

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