| Translated title of the contribution | 淺渠溝絕緣製程在深次微米的應用 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 1999 |
| Externally published | Yes |
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Shallow Trench Isolation (STI) for sub-micron MOSFET
- 何昆奇
Research output: Types of Thesis › Master's thesis