Simulation Analysis of Automated Material Handling and Storage Systems in a Semiconductor Wafer Fab

Fu-Kwun Wang, 呂博裕

Research output: Contribution to journal › Journal Article › peer-review

Keywords

@article{15ab3588b13c4afeb2b866141063b787,

title = "Simulation Analysis of Automated Material Handling and Storage Systems in a Semiconductor Wafer Fab",

keywords = "晶圓製造廠, 系統模擬, 自動化物料搬運與儲存系統, Wafer Fab, automated material handling and storage system, system simulation",

author = "Fu-Kwun Wang and 博裕呂",

year = "1999",

language = "繁體中文",

volume = "16",

pages = "183--194",

journal = "工業工程學刊",

issn = "1017-0669",

publisher = "Taylor and Francis Ltd.",

number = "2",

}

TY - JOUR

T1 - Simulation Analysis of Automated Material Handling and Storage Systems in a Semiconductor Wafer Fab

AU - Wang, Fu-Kwun

AU - 呂, 博裕

PY - 1999

Y1 - 1999

KW - 晶圓製造廠

KW - 系統模擬

KW - 自動化物料搬運與儲存系統

KW - Wafer Fab

KW - automated material handling and storage system

KW - system simulation

M3 - 文章

SN - 1017-0669

VL - 16

SP - 183

EP - 194

JO - 工業工程學刊

JF - 工業工程學刊

IS - 2

ER -