Translated title of the contribution | 氟離子佈植非晶矽薄膜之固相結晶 |
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Original language | American English |
Supervisors/Advisors |
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State | Published - 2011 |
Externally published | Yes |
Solid Phase Crystallization of Fluorine-Implanted Amorphous Silicon on SiO2
馬家騏
Research output: Types of Thesis › Doctoral thesis