Solid Phase Crystallization of Fluorine-Implanted Amorphous Silicon on SiO2

馬家騏

Research output: Types of ThesisDoctoral thesis

Translated title of the contribution氟離子佈植非晶矽薄膜之固相結晶
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2011
Externally publishedYes

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