Solid phase epitaxitial regrowth of amorphous silicon with phosphorus and carbon coimplantation

魏弘益

Research output: Types of ThesisMaster's thesis

Translated title of the contribution磷碳共同佈植非晶矽之固態磊晶成長
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2013
Externally publishedYes

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