Translated title of the contribution | 磷碳共同佈植非晶矽之固態磊晶成長 |
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Original language | American English |
Supervisors/Advisors |
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State | Published - 2013 |
Externally published | Yes |
Solid phase epitaxitial regrowth of amorphous silicon with phosphorus and carbon coimplantation
魏弘益
Research output: Types of Thesis › Master's thesis