Sputtering process parameters to structural and electrical properties of indium zinc oxide thin films

J. H. Hsieh, Chuan Li*, S. J. Liu, W. S. Lin

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'Sputtering process parameters to structural and electrical properties of indium zinc oxide thin films'. Together they form a unique fingerprint.

Chemistry

Material Science